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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
silicon carbide
carbide, II-VI semiconductor, IV semiconductor, IV-VI semiconductor, silicide

Citation:
Bozack M.J.
Surf. Sci. Spectra 3, 82
Pub Year:
1994

Data Processing:
Photoelectron Line

Measurement:
Anode Material:
Al
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Ag,Cu = 368.27,932.67
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
n-type doped 6H-SiC(0001) with a carrier concentration of 3.8E18 cm-3. The composition determined by XPS was Si0.566C0.434. The spectra were recorded at normal emission.

Specimen:
Method of Determining Specimen Composition:
X-ray Photoelectron Spectroscopy
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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