NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 22

Element

Atomic No

Formula

Spectral Line

Energy (eV)

Details

99.20

SiO₂/Si

103.70

SiO₂

103.60

SiO₂

533.20

SiO₂/Si

532.80

SiO₂

103.00

SiO₂

533.00

Si₂N₂O

101.70

Si₂N₂O

531.90

Si₂N₂O

397.40

Si₃N₄/Si

101.90

Si₃N₄/Si

397.80

Si₃N₄/InP

101.90

Si₃N₄/InP

397.80

SiO₀.₇N₀.₉/Si

102.20

SiO₀.₇N₀.₉/Si

532.10

SiO₀.₇N₀.₉/Si

397.60

SiO₀.₃₅N₁.₁/Si

102.10

SiO₀.₃₅N₁.₁/Si

532.30

SiO₀.₃₅N₁.₁/Si

397.70

Si₃N₄/Si

102.00

Si₃N₄/Si

397.90

Data Processing:

Photoelectron Line

397.70

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Adventitious carbon

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

30 nm Si3N4/Si(100). Low pressure CVD.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300