NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

SiCl₂/Si

Si*Cl₂/Si

silicon dichloride

13569-32-9

chloride, element, IV-VI semiconductor, silane

Citation:

Author Name(s):

Whitman L.J., Joyce S.A., Yarmoff J.A., McFeely F.R., Terminello L.J.

Journal:

Surf. Sci. 232, 297

DOI:

Pub Year:

1990

book All Records in this Publication

Data Processing:

Chemical Shift

CS-2p_3/2

1.90

Background Subtraction Method:

other

Peak Location Method:

mixed Gaussian/Lorentzian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

other source

X-ray Energy:

130

Overall Energy Resolution (eV):

0.1

Calibration:

Charge Reference:

Element

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

0.84 ML Cl2/Si(111)-(7x7), n-doped with 1 Ohm cm resistivity. The energy is referenced to the bulk state of the Si2p line

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

293