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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:
Summary Page
Tab Page Summary

General:
Element:
Al
Formula:
AlOx/Al
XPS Formula:
AlOx/Al*
Name:
aluminum oxides/aluminum
CAS Registry No:
7429-90-5
Class:
anhydride, catalyst, element, non-stoichiometric oxide, oxide

Citation:
Author Name(s):
Miller A.C., McCluskey F.P., Taylor J.A.
Journal:
J. Vac. Sci. Technol. A 9, 1461
DOI:
Pub Year:
1991

Data Processing:
Data Type:
Photoelectron Line
Line Designation:
2p3/2
Binding Energy (eV)
72.74
Energy Uncertainty:
0.02
Background Subtraction Method:
other
Peak Location Method:
Gaussian
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):

Measurement:
Use of X-ray Monochromator:
Yes
Anode Material:
Al
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
FL = Fermi level
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
Air passivated film. The spectra were recorded at normal emission and 70 degrees.

Specimen:
Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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