NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 44

Element

Atomic No

Formula

Spectral Line

Energy (eV)

Details

2p_3/2

99.79

2p_3/2

99.81

Si₃N₄

2p_3/2

102.34

Si₃N₄

398.60

Si₃N₄

2p_3/2

102.32

Si₃N₄

398.56

SiN₀.₀₅

2p_3/2

100.11

SiN₀.₀₅

397.55

SiN₀.₃₅

2p_3/2

100.62

SiN₀.₃₅

397.67

SiN₀.₄₅

2p_3/2

100.78

SiN₀.₄₅

397.69

SiN₀.₇₃

2p_3/2

101.30

SiN₀.₇₃

397.80

SiN₀.₈₂

2p_3/2

101.45

SiN₀.₈₂

397.80

SiN₀.₉₁

2p_3/2

101.55

SiN₀.₉₁

398.05

SiN₁.₃₃

2p_3/2

102.32

SiN₁.₃₃

398.58

SiN₁.₇₀

2p_3/2

102.36

SiN₁.₇₀

398.69

Si₃N₄

2p_3/2

101.64

Si₃N₄

397.90

Si₃N₄

2p_3/2

101.62

Si₃N₄

397.86

SiN₀.₀₅

2p_3/2

99.41

SiN₀.₀₅

396.85

SiN₀.₀₅

2p_3/2

99.92

SiN₀.₃₅

396.97

Data Processing:

Photoelectron Line

397.67

Background Subtraction Method:

other

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

0.98

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au,Cu = 84.00,932.67

Charge Reference:

Adventitious carbon

Energy Scale Evaluation:

Reliable, with two-point correction of energy scale

Comment:

The amorphous SiNx alloys are obtained by means of the Dual Beam Sputtering technique.

Specimen:

Method of Determining Specimen Composition:

Electron-Probe Microanalysis, X-ray Photoelectron Spectroscopy

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300