NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

BCl₃/Si

pure silicon

boron trichloride/silicon

CAS Registry No:

7440-21-3

Class:

boride, chloride, element

Citation:

Author Name(s):

Lapiano-Smith D.A., McFeely F.R.

Journal:

J. Appl. Phys. 72, 4907

DOI:

Pub Year:

1992

book All Records in this Publication

Data Processing:

Chemical Shift

CS-2p

0.00

Background Subtraction Method:

Peak Location Method:

Gaussian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

other source

X-ray Energy:

170

Overall Energy Resolution (eV):

0.2

Calibration:

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

1000 L BCl3/Si(111). The Si(111) surface was prepared by direct ohmic heating of the wafer to above 1273 K.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300