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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
Reliable, with one-point correction of energy scale
Comment:
Pure Si after Ar plasma bombardment (Ep = 100 eV) of a native oxide of B-doped Si(100) with a resistivity of 1.5 - 5 ohm cm. Emission angle = 55 degrees.