Tab Page Summary
titanium nitride/titanium
Siemensmeyer B., Bade K., Schultze J.W.
Ber. Bunsenges. Phys. Chem. 95, 1461
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mixed Gaussian/Lorentzian
Overall Energy Resolution (eV):
Calibration:
Au,Ag,Cu = 84.00,368.27,932.67
Charge Reference:
Conductor
Energy Scale Evaluation:
Calibration study
Comment:
The TiN layers with a thickness of about 80 A were prepared by implantation of 3 keV N2+ into polycrystalline Ti. The N+ ion dose was about 3E17 cm-2. FAT mode. The total FWHM is 1.8 eV.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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