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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
Cl2/GaAs0.96
chlorine/gallium arsenide(Cl2/GaAs0.96)
arsenide, element, III-V semiconductor

Citation:
DeLouise L.A.
J. Appl. Phys. 70, 1718
Pub Year:
1991

Data Processing:
Doublet Separation for Photoelectron Lines

Measurement:
Anode Material:
Mg
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Valence band minimum
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
0.45 ML Cl2/GaAs0.96(110). The Cl2 molecular beam with Ep = 0.14 eV was directed toward the surface at an incident angle of 60 degrees. The GaAs(110) wafer was initially degreased and wet etched in H2SO4:H2O2:H2O (5:1:1). Emission angle = 50 degrees.

Specimen:
Method of Determining Specimen Composition:
X-ray Photoelectron Spectroscopy
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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