Tab Page Summary
yttrium/silicon dioxide/silicon
element, non-stoichiometric oxide
Behner H., Wecker J., Matthee T., Samwer K.
Surf. Interface Anal. 18, 685
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Total Records: 19
Overall Energy Resolution (eV):
0.9
Calibration:
Au4f7 = 84.00
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
10 A of yttrium were deposited onto 17 A SiO2/Si(100) at 1003 K. The thickness was measured using a quartz-crystal thickness monitor.
Method of Determining Specimen Composition:
Rutherford Backscattering Spectrometry
Method of Determining Specimen Crystallinity:
Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction
Specimen Temperature (K):
300