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ditantalum pentoxide/ditantalum nitride
Prieto P., Galan L., Sanz J.M.
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Total Records: 4
Overall Energy Resolution (eV):
Calibration:
FL = Fermi level
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
47 A Ta2O5/3000 A Ta2N/glass. Ta2N thin film was grown by reactive sputtering in a nitrogen atmosphere.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300