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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
XeF
2
/Si
XPS Formula:
bulk state
Name:
xenon difluoride/silicon
CAS Registry No:
7440-21-3
Class:
element, fluoride
Author Name(s):
Simpson W.C., Yarmoff J.A., Hung W.H., McFeely F.R.
Journal:
Surf. Sci. 355, L283
DOI:
10.1016/0039-6028(96)00517-1
Pub Year:
1996
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Total Records:
8
Element
Atomic No
Formula
Spectral Line
Energy (eV)
Details
Si
14
XeF
2
/Si
CS-2p
3/2
0.00
Si
14
XeF
2
/Si
CS-2p
3/2
1.00
Si
14
XeF
2
/Si
CS-2p
3/2
2.04
Si
14
XeF
2
/Si
CS-2p
3/2
3.07
Si
14
XeF
2
/Si
CS-2p
3/2
0.00
Si
14
XeF
2
/Si
CS-2p
3/2
1.05
Si
14
XeF
2
/Si
DS-2p
0.60
Si
14
XeF
2
/Si
DS-2p
0.60
Data Type:
Chemical Shift
Line Designation:
CS-2p
3/2
Chemical Shift (eV):
0.00
Energy Uncertainty:
Background Subtraction Method:
other
Peak Location Method:
mixed Gaussian/Lorentzian
Full Width at Half-maximum Intensity (eV):
0.47
Gaussian Width (eV):
Lorentzian Width (eV):
0.080
Use of X-ray Monochromator:
No
Anode Material:
other source
X-ray Energy:
170
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Element
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
40 L XeF2/Si(111)-(7x7). The surface was lightly annealed to remove higher fluor
Specimen:
crystal
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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