NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 5

Element

Atomic No

Formula

Spectral Line

Energy (eV)

Details

C₂H₄/Si

CS-2p_3/2

1.30

C₂H₄/Si

CS-2p_1/2

1.30

C₂H₄/Si

282.80

C₂H₄/Si

2p_3/2

99.30

C₂H₄/Si

2p_1/2

99.70

Photoelectron Line

282.80

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Si2p3 = 99.34

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

C2H4 flux 2.7E15 molecules cm-2 s-1/Si(100) ) with a resistivity of 10 - 20 ohm cm (T = 1123 K, time = 30 min). The C/Si intensity ratio determined by XPS was 0.5. Branching ratio = 0.5.