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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
Si
3
N
4
Name:
silicon(IV) nitride
CAS Registry No:
12033-89-5
Class:
nitride, silicide
Author Name(s):
Wittberg T.N., Hoenigman J.R., Moddeman W.E., Cothern C.R., Gulett M.R.
Journal:
J. Vac. Sci. Technol. 15, 348
DOI:
10.1116/1.569544
Pub Year:
1978
book
All Records in this Publication
Data Type:
Photoelectron Line
Line Designation:
2p
3/2
Binding Energy (eV):
101.50
Energy Uncertainty:
Background Subtraction Method:
Peak Location Method:
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
No
Anode Material:
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Adventitious carbon
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
Specimen:
chemical vapor deposition
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
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