NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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Al

Ti/(MgO)₂(Al₂O₃)₂(SiO₂)₅

Al*

titanium/magnesium aluminum silicon oxide

CAS Registry No:

1302-88-1

mineral, oxide, silicate

Author Name(s):

Bortz M., Ohuchi F.S.

J. Appl. Phys. 64, 2054

Pub Year:

1988

book All Records in this Publication

Photoelectron Line

Line Designation:

2p_3/2

Binding Energy (eV):

71.40

Energy Uncertainty:

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

4-12 A Ti/cordierite. Cordierite-based thin films were deposited on Si(100) substrates using multitarget sputtering process. The films were amorphous near stoichiometric and 200 nm thick. The elemental Si in cordierite was used for charge reference (Si2p=99.34 eV).

amorphous, reacted, sputter deposited, thin layer, vapor deposited

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300

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