NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 8

Element

Atomic No

Formula

Spectral Line

Energy (eV)

Details

SiO₂/Si

CS-2p

0.95

SiO₂/Si

CS-2p

1.75

SiO₂/Si

CS-2p

2.48

SiO₂/Si

CS-2p

3.90

SiO₂/Si

DS-2p

0.61

SiOx/Si

99.34

SS-2p

0.50

SS-2p

0.80

Photoelectron Line

99.34

Background Subtraction Method:

other

Peak Location Method:

other type of curve fit

Full Width at Half-maximum Intensity (eV):

0.28

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Yes

Anode Material:

other source

X-ray Energy:

130

Overall Energy Resolution (eV):

Calibration:

Other, Si2p = 99.34

Charge Reference:

Element

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

10-30 A SiO2/Si. The films were obtained by oxidizing atomically clean Si surfaces in pure O2. Thickness of the films was determined by ellipsometry and checked with transmission electron microscopy.