NIST X-ray Photoelectron Spectroscopy Database

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SiOx/Si

Si*Ox/Si

silicon oxides/silicon

11126-22-0

anhydride, element, IV-VI semiconductor, non-stoichiometric oxide, oxide

Cardinaud C., Rhounna A., Turban G., Grolleau B.

Revue Phys. Appl. 24, 309

Pub Year:

1989

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Photoelectron Line

103.30

data

1.5

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Other, Si2p = 99.34

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

Native oxide.