NIST X-ray Photoelectron Spectroscopy Database

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SiO₂/Si

Si*O₂/Si

silicon dioxide/silicon

7631-86-9

element, IV semiconductor, non-stoichiometric oxide, oxide

Tyler B.J., Castner D.G., Ratner B.D.

J. Vac. Sci. Technol. A 7, 1646

Pub Year:

1989

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Chemical Shift

CS-2p

4.00

data

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

20 A and 40 A SiO2/Si.