NIST X-ray Photoelectron Spectroscopy Database

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AlOx/Al

aluminum oxides/aluminum

7429-90-5

anhydride, catalyst, element, non-stoichiometric oxide, oxide

Vasile M.J., Bachman B.J.

J. Vac. Sci. Technol. A 7, 2992

Pub Year:

1989

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Chemical Shift

CS-2p

2.70

data

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Element

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

Native oxide of 100 A aluminium film.