NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

One Page Summary

Instruction: Click on selected Tab for more information.

Element:

Formula:

Al₂O₃/Al

XPS Formula:

Al₂O₃/Al*

Name:

aluminum(III) trioxide/aluminum

CAS Registry No:

1344-28-1

Class:

anhydride, element, oxide

Author Name(s):

Rajopadhye N.R., Dake S.B., Bhoraskar S.V.

Journal:

Thin Solid Films 142, 127

DOI:

Pub Year:

1986

book All Records in this Publication

Photoelectron Line

117.90

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Other, Al2p=72.87

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

Specimen:

heated, oxidizing atmosphere, thermal oxide, thin layer, wafer

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

293