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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
SiCl
2
/Si
XPS Formula:
Si*Cl
2
/si
Name:
silicon dichloride
CAS Registry No:
13569-32-9
Class:
chloride, element, IV-VI semiconductor, silane
Author Name(s):
Whitman L.J., Joyce S.A., Yarmoff J.A., McFeely F.R., Terminello L.J.
Journal:
Surf. Sci. 232, 297
DOI:
10.1016/0039-6028(90)90122-O
Pub Year:
1990
book
All Records in this Publication
Data Type:
Chemical Shift
Line Designation:
CS-2p
3/2
Chemical Shift (eV):
1.72
Energy Uncertainty:
Background Subtraction Method:
other
Peak Location Method:
mixed Gaussian/Lorentzian
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
Yes
Anode Material:
other source
X-ray Energy:
130
Overall Energy Resolution (eV):
0.1
Calibration:
Charge Reference:
Element
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
0.61 ML Cl2/Si(111)-(7x7), n-doped with 1 Ohm cm resistivity. The energy is referenced to the bulk state of the Si2p line
Specimen:
adsorbed, surface coverage from 0ML to 1ML (0ML < coverage < 1ML), thin layer
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
293
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