NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 15

Element

Atomic No

Formula

Spectral Line

Energy (eV)

Details

CrN₀.₀₁₉

CS-2p_3/2

0.00

TiN₀.₁₉

CS-2p_3/2

0.10

VN₀.₀₆₅

CS-2p_3/2

0.50

3d_5/2

156.10

YN₀.₁₈

3d_5/2

157.40

3d_5/2

179.00

ZrN₀.₁₃

3d_5/2

180.00

4f_7/2

14.30

HfN₀.₁₉

4f_7/2

15.30

3d_5/2

202.40

NbN₀.₀₆₇

3d_5/2

203.20

4f_7/2

21.90

TaN₀.₀₇

4f_7/2

22.50

2p_3/2

72.70

AlN₀.₀₉₇

2p_3/2

72.70

Photoelectron Line

4f_7/2

22.50

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

The nitrogenation was carried out by bombarding the metal with 8-keV Ar+ ions in nitrogen at 1.0E-3 Pa. The approximate thickness of the TiN films obtained under these conditions was ~7 nm which is complete with to the range of the Ar+ ions.