NIST X-ray Photoelectron Spectroscopy Database

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SiOx/Si

Si*Ox/Si

silicon oxides/silicon

11126-22-0

anhydride, element, IV-VI semiconductor, non-stoichiometric oxide, oxide

Belton D.N., Harris S.J., Schmieg S.J., Weiner A.M., Perry T.A.

Appl. Phys. Lett. 54, 416

Pub Year:

1989

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Chemical Shift

CS-2p

3.70

data

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

SiOx/Si(100). A native oxide.