NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

One Page Summary

Instruction: Click on selected Tab for more information.

Element:

Formula:

BCl₃/Si

XPS Formula:

pure silicon

Name:

boron trichloride/silicon

CAS Registry No:

7440-21-3

Class:

boride, chloride, element

Author Name(s):

Lapiano-Smith D.A., McFeely F.R.

Journal:

J. Appl. Phys. 72, 4907

DOI:

Pub Year:

1992

book All Records in this Publication

Chemical Shift

CS-2p

0.00

Background Subtraction Method:

Peak Location Method:

Gaussian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

Yes

Anode Material:

other source

X-ray Energy:

170

Overall Energy Resolution (eV):

0.2

Calibration:

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

1000 L BCl3/Si(111). The Si(111) surface was prepared by direct ohmic heating of the wafer to above 1273 K.