NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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Cl

Cl₂/GaAs₀.₉₆

dissociated chlorine species

chlorine/gallium arsenide(Cl2/GaAs0.96)

CAS Registry No:

arsenide, element, III-V semiconductor

Photoelectron Line

Line Designation:

2p_3/2

Binding Energy (eV):

198.10

Energy Uncertainty:

Background Subtraction Method:

Linear

Peak Location Method:

Gaussian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

No

Anode Material:

Mg

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Valence band minimum

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

0.45 ML Cl2/GaAs0.96(110). The Cl2 molecular beam with Ep = 0.14 eV was directed toward the surface at an incident angle of 60 degrees. The GaAs(110) wafer was initially degreased and wet etched in H2SO4:H2O2:H2O (5:1:1). Emission angle = 50 degrees.

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