There was a problem with the connection!
menu
NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
Details Summary:
Summary Page
One Page Summary
Instruction:
Click on selected Tab for more information.
General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
SiOx/Si
XPS Formula:
SiOx/Si*
Name:
silicon oxides/silicon
CAS Registry No:
11126-22-0
Class:
anhydride, element, IV-VI semiconductor, non-stoichiometric oxide, oxide
Author Name(s):
Saliman S., Delfino M.
Journal:
J. Appl. Phys. 70, 3970
DOI:
10.1063/1.349160
Pub Year:
1991
book
All Records in this Publication
Data Type:
Photoelectron Line
Line Designation:
2p
3/2
Binding Energy (eV):
99.10
Energy Uncertainty:
Background Subtraction Method:
other
Peak Location Method:
Gaussian
Full Width at Half-maximum Intensity (eV):
0.5
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
No
Anode Material:
Al
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Au4f7 = 84.00
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
Native oxide of B-doped Si(100) with a resistivity of 1.5 - 5 ohm cm. The thickness determined by ellipsometry was ~ 2nm. Emission angle = 55 degrees.
Specimen:
native oxide, oxidizing atmosphere, semiconductor
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
Go Back
Home
search
Identify Unknown Spectral Lines
search
Retrieve Data for Elements
keyboard_arrow_down
Selected Spectral Type and Element
Reference Data
search
Retrieve Data for Compounds
keyboard_arrow_down
Elemental Composition
Chemical Name
Chemical Classes
Data for One Element
assessment
Plots
keyboard_arrow_down
Wagner Plot
Chemical Shifts
search
Search Scientific Citations
assignment
More Options
keyboard_arrow_down
Introduction
Data Field Definitions
Citation
Contact
Version History
Acknowledgement
Disclaimer
An error has occurred. This application may no longer respond until reloaded.
Reload
🗙