NIST X-ray Photoelectron Spectroscopy Database

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SiO₂/Si

silicon dioxide/silicon

7631-86-9

element, IV semiconductor, non-stoichiometric oxide, oxide

Koshino K., Matsuo J., Nakamura M.

Jpn. J. Appl. Phys. Part 1 32, 3063

Pub Year:

1993

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Photoelectron Line

103.70

data

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Other, Si2p = 99.34

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

50 A SiO2/Si.