NIST X-ray Photoelectron Spectroscopy Database

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Ta₂O₅/Ta₂N

Ta*₂O₅/Ta₂N

ditantalum pentoxide/ditantalum nitride

1314-61-0

nitride, oxide

Prieto P., Galan L., Sanz J.M.

Appl. Surf. Sci. 70, 186

Pub Year:

1993

Photoelectron Line

4f_7/2

27.05

data

1.35

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

FL = Fermi level

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

47 A Ta2O5/3000 A Ta2N/glass. Ta2N thin film was grown by reactive sputtering in a nitrogen atmosphere.