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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
O
2
/Si
XPS Formula:
Si(IV) state
Name:
oxygen/silicon
CAS Registry No:
7782-44-7
Class:
element, IV semiconductor, non-stoichiometric oxide, oxide
Author Name(s):
Lu Z.H., Graham M.J., Jiang D.T., Tan K.H.
Journal:
Appl. Phys. Lett. 63, 2941
DOI:
10.1063/1.110279
Pub Year:
1993
book
All Records in this Publication
Data Type:
Chemical Shift
Line Designation:
CS-2p
Chemical Shift (eV):
3.82
Energy Uncertainty:
Background Subtraction Method:
Shirley
Peak Location Method:
Gaussian
Full Width at Half-maximum Intensity (eV):
1.13
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
No
Anode Material:
other source
X-ray Energy:
130
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Element
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
6E3 L O2/Si(100)-(2x1). Adsorption of O2 was performed at 2E-5 Torr at 1023 K for 5 min.
Specimen:
oxidizing atmosphere, oxygen pressure, reacted, thermal oxide, thin layer
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Low-energy Electron Diffraction
Specimen Temperature (K):
300
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