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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
Reliable, with one-point correction of energy scale
Comment:
Si(100) was exposed to 600 L O2 at 1020 K and annealed (T = 1020 K, time = 10 min). The substrate was cleaned by cycles of Ar+ ion bombardment (Ep = 3.5 keV) and annealing (T = 1100 K).