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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
Reliable (reported energy within 300 eV of a reference energy)
Comment:
Ta2N thin film 3000 A thick was grown onto glass by reactive sputtering in a nitrogen atmosphere. The sample was cleaned by cycles of Ar+ ion bombardment (Ep = 2 keV, j = 2 microamperes cm-2) and annealing (T = 1300 K).