Comment:
The 14-nm-thin TiN film was grown by reactive evaporation of Ti in a nitrogen atmosphere (p = 5E-4 - 5E-6 Torr). Peak locations: Doniach - Sunjic & Gaussian. Asymmetry parameter = 0.32. The thickness was measured using a quartz-crystal thickness monitor. FAT mode. Emission angle = 15 degrees.