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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Ti
Formula:
TiN
0
.
9
Name:
titanium nitride/stainless steel
CAS Registry No:
25583-20-4
Class:
nitride
Author Name(s):
Prieto P., Kirby R.E.
Journal:
J. Vac. Sci. Technol. A 13, 2819
DOI:
10.1116/1.579711
Pub Year:
1995
book
All Records in this Publication
Data Type:
Photoelectron Line
Line Designation:
2p
3/2
Binding Energy (eV):
454.77
Energy Uncertainty:
0.05
Background Subtraction Method:
other
Peak Location Method:
mixed Gaussian/Lorentzian
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
No
Anode Material:
Mg
X-ray Energy:
Overall Energy Resolution (eV):
0.75
Calibration:
Ag3d5, PdFL= 368.27, 0.0
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
The film thickness measured using a quartz-crystal thickness monitor was 14 nm. Peak locations: Doniach - Sunjic & Gaussian. FAT mode. Emission angle = 15 degrees.
Specimen:
sputter deposited, thin film
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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