NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

Si₃N₄

silicon(IV) nitride

12033-89-5

nitride, silicide

Citation:

Author Name(s):

Bois L., L'Haridon P., Laurent Y., Gouin X., Grange P., Letard J.-F., et al.

Journal:

J. Alloys and Compounds 232, 244

DOI:

Pub Year:

1996

book All Records in this Publication

Data Processing:

Photoelectron Line

397.70

Background Subtraction Method:

other

Peak Location Method:

mixed Gaussian/Lorentzian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Adventitious carbon

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

An electron flood gun (Ep = 6eV) and a nickel grid placed 3mm above the sample surface were used for charge compensation. FAT mode.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300