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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:
Summary Page
Tab Page Summary

General:
Element:
Al
Formula:
Ti/(MgO)2(Al2O3)2(SiO2)5
XPS Formula:
Al*
Name:
titanium/magnesium aluminum silicon oxide
CAS Registry No:
1302-88-1
Class:
mineral, oxide, silicate

Citation:
Author Name(s):
Bortz M., Ohuchi F.S.
Journal:
J. Appl. Phys. 64, 2054
DOI:
Pub Year:
1988

Data Processing:
Data Type:
Photoelectron Line
Line Designation:
2p3/2
Binding Energy (eV)
71.40
Energy Uncertainty:
Background Subtraction Method:
Peak Location Method:
data
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):

Measurement:
Use of X-ray Monochromator:
Yes
Anode Material:
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Au4f7 = 84.00
Charge Reference:
Element
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
4-12 A Ti/cordierite. Cordierite-based thin films were deposited on Si(100) substrates using multitarget sputtering process. The films were amorphous near stoichiometric and 200 nm thick. The elemental Si in cordierite was used for charge reference (Si2p=99.34 eV).

Specimen:
Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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