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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:
Summary Page
Tab Page Summary

General:
Element:
Si
Formula:
Si3N4
Name:
silicon(IV) nitride
CAS Registry No:
12033-89-5
Class:
nitride, silicide

Citation:
Author Name(s):
Donley M.S., Baer D.R., Stoebe T.G.
Journal:
Surf. Interface Anal. 11, 335
DOI:
Pub Year:
1988

Data Processing:
Data Type:
Auger-Electron Line
Line Designation:
KL23L23(1D)
Kinetic Energy (eV)
1611.70
Energy Uncertainty:
Background Subtraction Method:
Peak Location Method:
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):

Measurement:
Use of X-ray Monochromator:
No
Anode Material:
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Au,Cu
Charge Reference:
Energy Scale Evaluation:
Reliable
Comment:

Specimen:
Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
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