Tab Page Summary
    
    
    
        
        
        
        
                Powell C.J., Erickson N.E., Jach T.
 
            
                J. Vac. Sci. Technol. 20, 625
 
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            Overall Energy Resolution (eV):
                 
            Calibration:
                DVM e-beam,NiFL,MgK
 
            Charge Reference:
                Conductor
 
            Energy Scale Evaluation:
                Calibration study
 
            
            
            
            Method of Determining Specimen Composition:
                 
            Method of Determining Specimen Crystallinity:
                 
            Specimen Temperature (K):