Tab Page Summary
trisilicon tetranitride/silicon
Finster J., Klinkenberg E.-D., Heeg J.
Overall Energy Resolution (eV):
Charge Reference:
Adventitious carbon
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
80 nm Si3N4/Si(100). Low pressure CVD.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300