Tab Page Summary
silicon oxynitride (SiO0.7N0.9/Si)/silicon
Finster J., Klinkenberg E.-D., Heeg J.
Overall Energy Resolution (eV):
Charge Reference:
Adventitious carbon
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
30 nm SiO0.7N0.9/Si(100). Low pressure CVD.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300