NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

Element:

Formula:

SiHx

XPS Formula:

amorphous hydrogenated silicon atoms

Name:

silicon hydride (SiHx)

CAS Registry No:

Class:

hydride, silicide

Citation:

Author Name(s):

Hayashi T., Hazama Y., Miyazaki S., Hirose M.

Journal:

Jpn. J. Appl. Phys. Part 2 27, L986

DOI:

Pub Year:

1988

book All Records in this Publication

Data Processing:

Photoelectron Line

99.50

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

Hydrogenated amorphous silicon.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300