Tab Page Summary
element, IV semiconductor, non-stoichiometric oxide, oxide
Tyler B.J., Castner D.G., Ratner B.D.
J. Vac. Sci. Technol. A 7, 1646
Overall Energy Resolution (eV):
Charge Reference:
Element
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
20 A and 40 A SiO2/Si.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
293