NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

AlOx/Al

AlOx/Al*

aluminum oxides/aluminum

CAS Registry No:

7429-90-5

Class:

anhydride, catalyst, element, non-stoichiometric oxide, oxide

Citation:

Author Name(s):

Miller A.C., McCluskey F.P., Taylor J.A.

Journal:

J. Vac. Sci. Technol. A 9, 1461

DOI:

Pub Year:

1991

book All Records in this Publication

Data Processing:

Photoelectron Line

2p_3/2

72.74

0.02

Background Subtraction Method:

other

Peak Location Method:

Gaussian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

FL = Fermi level

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

Air passivated film. The spectra were recorded at normal emission and 70 degrees.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300