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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
Ta0.4N0.5
tantalum nitride
nitride

Citation:
Badrinarayanan S., Sinha S.
J. Appl. Phys. 69, 1141
Pub Year:
1991

Data Processing:
Photoelectron Line

Measurement:
Anode Material:
Al
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Au,Ag,Cu = 84.00,368.27,932.67
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
FAT mode. The sample was cleaned by cycles of Ar+ ion bombardment and annealing (T = 823 K). The N2+ ions were implanted at 8 keV ( j = 20 microamperes/cm2 , time = 20 min). The number of implanted atoms was ~2.4E17 ions/cm2.

Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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