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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:
Summary Page
Tab Page Summary

General:
Element:
Si
Formula:
Cl2/Si
XPS Formula:
SiCl species
Name:
chlorine/silicon
CAS Registry No:
Class:
chloride, element

Citation:
Author Name(s):
Lapiano-Smith D.A., McFeely F.R.
Journal:
J. Appl. Phys. 72, 4907
DOI:
Pub Year:
1992

Data Processing:
Data Type:
Chemical Shift
Line Designation:
CS-2p
Chemical Shift (eV)
0.90
Energy Uncertainty:
Background Subtraction Method:
other
Peak Location Method:
Gaussian
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):

Measurement:
Use of X-ray Monochromator:
Yes
Anode Material:
other source
X-ray Energy:
170
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Element
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
10 L Cl2/Si(111). The Si(111) surface was prepared by direct ohmic heating of the wafer to above 1273 K. The intensity ratio of the surface/bulk components was 0.5.

Specimen:
Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300
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