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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:
Summary Page
Tab Page Summary

General:
Element:
Zr
Formula:
(ZrO2)91(Y2O3)9/Si
XPS Formula:
oxide state
Name:
zirconium dioxide diyttrium trioxide/silicon
CAS Registry No:
Class:
double oxide, element, non-stoichiometric oxide, oxide

Citation:
Author Name(s):
Behner H., Wecker J., Matthee T., Samwer K.
Journal:
Surf. Interface Anal. 18, 685
DOI:
Pub Year:
1992

Data Processing:
Data Type:
Photoelectron Line
Line Designation:
3d3/2
Binding Energy (eV)
185.30
Energy Uncertainty:
Background Subtraction Method:
Linear
Peak Location Method:
Gaussian
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):

Measurement:
Use of X-ray Monochromator:
No
Anode Material:
Mg
X-ray Energy:
Overall Energy Resolution (eV):
0.9
Calibration:
Au4f7 = 84.00
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
10 A of yttria-stabilized zirconia were deposited onto p-type Si(100)-(2x1) with a resistivity of 1ohm cm at 1003 K. The substrate was cleaned by sputtering with a fast ion beam. The thickness was measured using a quartz-crystal thickness monitor.

Specimen:
Specimen:
Method of Determining Specimen Composition:
Rutherford Backscattering Spectrometry
Method of Determining Specimen Crystallinity:
Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction
Specimen Temperature (K):
300
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