Tab Page Summary
element, IV semiconductor, non-stoichiometric oxide, oxide
Jpn. J. Appl. Phys. Part 1 32, 4799
Anode Material:
other source
Overall Energy Resolution (eV):
Charge Reference:
Element
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
6 A SiO2/Si. X-ray excitation energy = 114, 116.5, 119, and 149 eV. The thickness was measured by ellipsometry.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300