Detail summary:
General Citation Data Processing Measurement Information Specimen Information Comment
General:
Element: O
Formula: Al2O3
XPS Formula:
Name: dialuminum(III) trioxide
CAS Registry No: 1344-28-1
Classes: anhydride, oxide
Citation:
Author Name(s): von Richthofen A., Domnick R.
Journal: Thin Solid Films 283, 37 (1996)
Data Processing:
Data Type: Photoelectron Line
Line Designation: 1s
Quality of Data: Adequate
Binding Energy (eV) 531.3
Energy Uncertainty: 0.3
Background Subtraction Method:
Peak Location Method: data
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Measurement Information:
Use of X-ray Monochromator: No
Excitation Energy: Mg
X-ray Energy:
Overal Energy Resolution (eV):
Calibration: Ar2p3 = 241.85
Charge Reference: Argon
Energy Scale Evalution: Reliable, with one-point correction of energy scale
Specimen Information:
Specimen: sputter deposited, thick film
Method of Determining Specimen Composition: X-ray Photoelectron Spectroscopy
Method of Determining Specimen Crystallinity:
Specimen Temperature (K): 300
Sample Quality: Adequate
Comment:
Notes: The Cu substrate was cleaned by two cycles of Ar+ ion bombardment (Ep = 5 keV, Ip = 50 nA, angle of incidence = 70 degrees). The composition determined by XPS was Al0.407O0.593.
General Citation Data Processing Measurement Information Specimen Information Comment
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