| General:
|
| Element:
|
O
|
| Formula:
|
Al2O3
|
| XPS Formula:
|
|
| Name:
|
dialuminum(III) trioxide
|
| CAS Registry No:
|
1344-28-1
|
| Classes:
|
anhydride, oxide
|
| Citation:
|
| Author Name(s):
|
Leinen D., Lassaletta G., Fernandez A., Caballero A., Gonzalez-Elipe A.R., et al.
|
| Journal:
|
J. Vac. Sci. Technol. A 14, 2842 (1996)
|
| Data Processing:
|
| Data Type:
|
Photoelectron Line
|
| Line Designation:
|
1s
|
| Quality of Data:
|
Adequate
|
|
Binding Energy (eV)
|
531.5
|
| Energy Uncertainty:
|
|
| Background Subtraction Method:
|
|
| Peak Location Method:
|
data
|
| Full Width at Half-maximum Intensity (eV):
|
|
| Gaussian Width (eV):
|
|
| Lorentzian Width (eV):
|
|
| Measurement Information:
|
| Use of X-ray Monochromator:
|
No
|
| Excitation Energy:
|
Mg
|
| X-ray Energy:
|
|
| Overal Energy Resolution (eV):
|
|
| Calibration:
|
|
| Charge Reference:
|
Adventitious carbon
|
| Energy Scale Evalution:
|
Reliable, with one-point correction of energy scale
|
| Specimen Information:
|
| Specimen:
|
chemical vapor deposition, insulator, thick film
|
| Method of Determining Specimen Composition:
|
|
| Method of Determining Specimen Crystallinity:
|
|
| Specimen Temperature (K):
|
300
|
| Sample Quality:
|
Adequate
|
| :
|
| Notes:
|
|