Detail summary:
General Citation Data Processing Measurement Information Specimen Information Comment

General:
Element: F
Formula: SF6
XPS Formula:
Name: sulfur(VI) hexafluoride
CAS Registry No: 2551624
Classes: fluoride, sulfide
Citation:
Author Name(s): Chuang T.J., Coufal H., Traeger F.
Journal: J. Vac. Sci. Technol. A 1, 1236 (1983)
Data Processing:
Data Type: Photoelectron Line
Line Designation: 1s
Quality of Data:
Binding Energy (eV) 693.5
Energy Uncertainty:
Background Subtraction Method:
Peak Location Method:
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Measurement Information:
Use of X-ray Monochromator: No
Excitation Energy:
X-ray Energy:
Overal Energy Resolution (eV):
Calibration: Ag
Charge Reference: Conductor
Energy Scale Evalution:
Specimen Information:
Specimen: vapor deposited
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
Sample Quality:
Comment:
Notes:

General Citation Data Processing Measurement Information Specimen Information Comment

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