Detail summary:
General Citation Data Processing Measurement Information Specimen Information Comment

General:
Element: O
Formula: SiO2
XPS Formula:
Name: silicon dioxide (CasNo: 7631-86-9)
CAS Registry No: 7631-86-9
Classes: IV semiconductor, mineral, oxide
Citation:
Author Name(s): Montero I., Galan L., de la Cal E., Albella J.M., Pivin J.C.
Journal: Thin Solid Films 193, 325 (1990)
Data Processing:
Data Type: Photoelectron Line
Line Designation: 1s
Quality of Data: Adequate
Binding Energy (eV) 533.8
Energy Uncertainty: 0.05
Background Subtraction Method:
Peak Location Method: data
Full Width at Half-maximum Intensity (eV): 1.8
Gaussian Width (eV):
Lorentzian Width (eV):
Measurement Information:
Use of X-ray Monochromator: No
Excitation Energy: Mg
X-ray Energy:
Overal Energy Resolution (eV):
Calibration: Au,Ag = 84.00,368.27
Charge Reference: Gold
Energy Scale Evalution: Reliable, with one-point correction of energy scale
Specimen Information:
Specimen: insulator, thermal oxide, thick oxide
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K): 293
Sample Quality: Good
Comment:
Notes: The composition of the thermal oxide determined by XPS is SiO2.1.

General Citation Data Processing Measurement Information Specimen Information Comment

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